Title :
Permanent tuning of high-Q silicon microring resonators by Fs laser surface modification
Author :
Bachman, D. ; Chen, Zhe ; Fedosejevs, Robert ; Tsui, Y.Y. ; Van, V.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Alberta, Edmonton, AB, Canada
fDate :
June 30 2013-July 4 2013
Abstract :
Post-fabrication tuning of silicon microring resonators is accomplished using single fs laser pulses at 400nm with a tuning rate of 20nm/J·cm-2. The resonance mismatch of a 2nd-order microring filter is also corrected.
Keywords :
elemental semiconductors; high-speed optical techniques; micro-optics; optical filters; optical resonators; optical tuning; silicon; 2nd-order microring filter; Si; fs laser surface modification; high-Q silicon microring resonators; permanent tuning; post-fabrication tuning; resonance mismatch; single fs laser pulses; wavelength 400 nm; Indexes; Laser tuning; Resonator filters; Silicon; Surface waves; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600446
