Title :
Design considerations for basic MEMS electrostatic actuators
Author :
Hassanzadeh, Alireza
Author_Institution :
ECE Dept., Univ. of Alabama in Huntsville, Huntsville, AL
Abstract :
In this paper various practical and theoretical design considerations that lead to a successful MEMS electrostatic actuator design for laboratory-training purposes are examined and simulation results are presented. Two basic actuator structures cantilever beam and fixed beam are simulated using SUGAR MEMS simulation software. Simulation results show the proper size of the actuator for fabrication.
Keywords :
electrostatic actuators; finite element analysis; MEMS; SUGAR; electrostatic actuator; finite element simulation; simulation software; Electrostatic actuators; Etching; Fabrication; Laboratories; MATLAB; Microelectromechanical devices; Micromechanical devices; Microstructure; Structural beams; Voltage;
Conference_Titel :
System Theory, 2009. SSST 2009. 41st Southeastern Symposium on
Conference_Location :
Tullahoma, TN
Print_ISBN :
978-1-4244-3324-7
Electronic_ISBN :
0094-2898
DOI :
10.1109/SSST.2009.4806807
