• DocumentCode
    3065436
  • Title

    A novel Drain/Source On Insulator (DSOI) structure to fully suppress the floating-body and self-heating effects

  • Author

    Wensong, Chen ; Lilin, Tian ; Zhijian, Li

  • Author_Institution
    Inst. of Microelectron., Tsinghua Univ., Beijing, China
  • fYear
    1998
  • fDate
    1998
  • Firstpage
    575
  • Lastpage
    578
  • Abstract
    To alleviate the thermal transfer problem and floating body effects in SOI devices, a new device structure called DSOI (Drain/Source On Insulator) is proposed and analyzed in this paper. The effectiveness of thermal resistance reduction is demonstrated using our new simple analytical model, which takes account of the cross-device thermal coupling effects for the first time. The predications of the model agree well with the 2-D numerical simulation and experimental results. The device simulation results show that BULK, SOI, and DSOI devices deliver almost the same amount of driving current in ~0.1 μM regime even without considering the self-heating effects. And the DSOI structure speed advantage becomes more prominent if self-heating effects are included
  • Keywords
    MOSFET; semiconductor device models; silicon-on-insulator; thermal resistance; 2D numerical simulation; DSOI device; MOSFET; SOI device; analytical model; bulk device; drain/source on insulator device; floating-body effect; self-heating effect; thermal coupling; thermal resistance; thermal transfer; Analytical models; CMOS technology; Fabrication; Insulation; Microelectronics; Silicon; Space technology; Substrates; Thermal conductivity; Thermal resistance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
  • Conference_Location
    Beijing
  • Print_ISBN
    0-7803-4306-9
  • Type

    conf

  • DOI
    10.1109/ICSICT.1998.785952
  • Filename
    785952