DocumentCode
3065436
Title
A novel Drain/Source On Insulator (DSOI) structure to fully suppress the floating-body and self-heating effects
Author
Wensong, Chen ; Lilin, Tian ; Zhijian, Li
Author_Institution
Inst. of Microelectron., Tsinghua Univ., Beijing, China
fYear
1998
fDate
1998
Firstpage
575
Lastpage
578
Abstract
To alleviate the thermal transfer problem and floating body effects in SOI devices, a new device structure called DSOI (Drain/Source On Insulator) is proposed and analyzed in this paper. The effectiveness of thermal resistance reduction is demonstrated using our new simple analytical model, which takes account of the cross-device thermal coupling effects for the first time. The predications of the model agree well with the 2-D numerical simulation and experimental results. The device simulation results show that BULK, SOI, and DSOI devices deliver almost the same amount of driving current in ~0.1 μM regime even without considering the self-heating effects. And the DSOI structure speed advantage becomes more prominent if self-heating effects are included
Keywords
MOSFET; semiconductor device models; silicon-on-insulator; thermal resistance; 2D numerical simulation; DSOI device; MOSFET; SOI device; analytical model; bulk device; drain/source on insulator device; floating-body effect; self-heating effect; thermal coupling; thermal resistance; thermal transfer; Analytical models; CMOS technology; Fabrication; Insulation; Microelectronics; Silicon; Space technology; Substrates; Thermal conductivity; Thermal resistance;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location
Beijing
Print_ISBN
0-7803-4306-9
Type
conf
DOI
10.1109/ICSICT.1998.785952
Filename
785952
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