• DocumentCode
    3066056
  • Title

    ASET activities toward the 21st century

  • Author

    Ishitani, Akihiko

  • Author_Institution
    Assoc. of Super-Adv. Electron. Technol., Tokyo, Japan
  • fYear
    1999
  • fDate
    1999
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    ASET is a Japanese electronics research and development (R&D) consortium, and founded to innovate technology infrastructure for the 21st century. Firstly, MITI prepared this project, and asked NEDO for implementing this project. MITI is Ministry of International Trade and Industry, and NEDO is New Energy and Industrial Technology Development organization. NEDO informed this project to industry. Industry submitted application forms to NEDO. Qualified companies by NEDO organized ASET. ASET has 36 member companies. Of the 36, 18 companies are involved in semiconductor R&D of ASET
  • Keywords
    lithography; research initiatives; technological forecasting; ASET; Japanese electronics research and development consortium; lithography; semiconductor industry; technological innovation; Electron beams; Lithography; Mass production; Metrology; Optical design; Optical devices; Research and development; Throughput; Ultraviolet sources; Writing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, Systems, and Applications, 1999. International Symposium on
  • Conference_Location
    Taipei
  • ISSN
    1524-766X
  • Print_ISBN
    0-7803-5620-9
  • Type

    conf

  • DOI
    10.1109/VTSA.1999.785984
  • Filename
    785984