MEMS technology and applications

Author

Polla, Dennis L.

Author_Institution

Dept. of Biomed. Eng., Minnesota Univ., Minneapolis, MN, USA

fYear

1999

fDate

1999

Firstpage

5

Abstract

Summary form only given. This talk will primarily discuss several representative systems applications of microelectromechanical systems (MEMS) for smart physical sensing, minimally invasive surgery, robotics, and bioanalytic medicine. This talk will describe MEMS materials, processing technologies, and device applications including i) physical microsensors for detecting force, pressure, and acoustic energy, 2) microvalves, micropumps, and capillaries for microfluidic controls; 3) biosensors based on molecular recognition structures; 4) miniature linear micromotors for precision positioning and manipulation of cells; and 5) surgical and scientific microinstruments. Selected successful systems demonstration applications from the fields of ophthalmology, arthroscopic surgery, gynecology, and laboratory medicine will be presented. Design issues, technology limitations, systems integration approaches, and future opportunities of MEMS will be discussed

Keywords

micromechanical devices; MEMS technology; bioanalytic medicine; microelectromechanical system; minimally invasive surgery; robotics; smart sensor; Acoustic materials; Biological materials; Biomedical materials; Intelligent robots; Medical robotics; Microelectromechanical systems; Micromechanical devices; Microsensors; Minimally invasive surgery; Robot sensing systems;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, Systems, and Applications, 1999. International Symposium on

Conference_Location

Taipei

ISSN

1524-766X

Print_ISBN

0-7803-5620-9

Type

conf

DOI

10.1109/VTSA.1999.785985

Filename

785985