Microwave switch using MEMS-technology

Integration of a Micro-sensor, Micro-actuator, Micro-electro-mechanical filter, RF switches, signal processing and intelligent control at one place that fit on to the surface of computer chip can provide a miniaturized systems and such devices go under different names, such as smart structure, smart sensors or micro-electro-mechanical systems (MEMS). These devices have numerous applications in medicine, aerospace, auto-motive and defense systems and the MEMS technology is starting to branch out into desperate application in the field of micro-wave components/systems. Much of the activity has been driven by the ability of MEMS to miniaturize, reduce the cost, and improve the performance of, transducers and actuators previously fabricated by hybrid techniques. Though some systems have been developed, most of them are in the development stage or conceptual stage. This paper presents a review of the MEMS design and development and describes a RF-switch at 26 GHz