DocumentCode
3066693
Title
Ablation process of PMMA induced by irradiation with laser plasma EUV light
Author
Sugiura, Naoto ; Torii, Shuichi ; Makimura, Tetsuya ; Ichinosawa, Yoshiyuki ; Okazaki, Kenjiro ; Nakamura, Daisuke ; Takahashi, Asami ; Okada, Takashi ; Niino, Hiroyuki ; Murakami, Kazuki
Author_Institution
Inst. of Appl. Phys., Univ. of Tsukuba, Tsukuba, Japan
fYear
2013
fDate
June 30 2013-July 4 2013
Firstpage
1
Lastpage
2
Abstract
We have investigated ablation process of PMMA induced by irradiation with laser plasma EUV light. Appling the technique, micro-structured mold can be fabricated by transferring structures of the master PMMA plate.
Keywords
laser ablation; micromachining; moulding; plasma production by laser; polymers; ablation process; laser plasma EUV light; master PMMA plate; microstructured mold; Laser ablation; Optical filters; Plasmas; Radiation effects; Surface emitting lasers; Tin; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location
Kyoto
Type
conf
DOI
10.1109/CLEOPR.2013.6600550
Filename
6600550
Link To Document