Title :
Ablation process of PMMA induced by irradiation with laser plasma EUV light
Author :
Sugiura, Naoto ; Torii, Shuichi ; Makimura, Tetsuya ; Ichinosawa, Yoshiyuki ; Okazaki, Kenjiro ; Nakamura, Daisuke ; Takahashi, Asami ; Okada, Takashi ; Niino, Hiroyuki ; Murakami, Kazuki
Author_Institution :
Inst. of Appl. Phys., Univ. of Tsukuba, Tsukuba, Japan
fDate :
June 30 2013-July 4 2013
Abstract :
We have investigated ablation process of PMMA induced by irradiation with laser plasma EUV light. Appling the technique, micro-structured mold can be fabricated by transferring structures of the master PMMA plate.
Keywords :
laser ablation; micromachining; moulding; plasma production by laser; polymers; ablation process; laser plasma EUV light; master PMMA plate; microstructured mold; Laser ablation; Optical filters; Plasmas; Radiation effects; Surface emitting lasers; Tin; Ultraviolet sources;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600550
