Title :
Micromachining of polydimethylsiloxane using EUV light
Author :
Fukami, Shunsuke ; Torii, Shuichi ; Makimura, Tetsuya ; Okazaki, Kenjiro ; Nakamura, Daisuke ; Takahashi, Asami ; Okada, Takashi ; Niino, Hiroyuki ; Murakami, Kazuki
Author_Institution :
Inst. of Appl. Phys., Univ. of Tsukuba, Tsukuba, Japan
fDate :
June 30 2013-July 4 2013
Abstract :
We studied the method to fabricate microstructures in PDMS sheet using laser-generated EUV light. In the high power density EUV light irradiation region, PDMS can be machined without chemical modification.
Keywords :
crystal microstructure; laser beam machining; optical polymers; ultraviolet spectra; EUV light irradiation region; PDMS sheet; high power density; laser-generated EUV light; micromachining; microstructures; polydimethylsiloxane; Chemical lasers; Density measurement; Educational institutions; Optical surface waves; Power system measurements; Radiation effects; Ultraviolet sources;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600551
