• DocumentCode
    3066704
  • Title

    Micromachining of polydimethylsiloxane using EUV light

  • Author

    Fukami, Shunsuke ; Torii, Shuichi ; Makimura, Tetsuya ; Okazaki, Kenjiro ; Nakamura, Daisuke ; Takahashi, Asami ; Okada, Takashi ; Niino, Hiroyuki ; Murakami, Kazuki

  • Author_Institution
    Inst. of Appl. Phys., Univ. of Tsukuba, Tsukuba, Japan
  • fYear
    2013
  • fDate
    June 30 2013-July 4 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We studied the method to fabricate microstructures in PDMS sheet using laser-generated EUV light. In the high power density EUV light irradiation region, PDMS can be machined without chemical modification.
  • Keywords
    crystal microstructure; laser beam machining; optical polymers; ultraviolet spectra; EUV light irradiation region; PDMS sheet; high power density; laser-generated EUV light; micromachining; microstructures; polydimethylsiloxane; Chemical lasers; Density measurement; Educational institutions; Optical surface waves; Power system measurements; Radiation effects; Ultraviolet sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
  • Conference_Location
    Kyoto
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2013.6600551
  • Filename
    6600551
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3066704