Title :
Control of microstructures by two interfered femtosecond laser pluses using biprism
Author :
Konda, O. ; Sato, Takao ; Itoigawa, F. ; Ono, Shintaro ; Ota, Masashi
Author_Institution :
Nagoya Inst. of Technol., Nagoya, Japan
fDate :
June 30 2013-July 4 2013
Abstract :
Periodic microgrooves on Si wafer induced by interfered femtosecond laser pluses using biprism are reported. Shape of microstructures is controlled by laser fluence, scanning numbers, and base angle of biprism. Tribological property changes by microgrooves.
Keywords :
elemental semiconductors; laser materials processing; light interference; optical control; optical prisms; silicon; tribology; biprism; control microstructures; interfered femtosecond laser pluses; laser fluence; periodic microgrooves; scanning numbers; tribological property; Laser ablation; Laser beams; Microstructure; Silicon; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600558
