Title :
A Quick Experimental Technique In Estimating The Cumulative Plasma Charging Current with MOSFET and Determining The Reliability of The Protection Diode In The Plasma Ambient
Author :
Zheng, Scott ; Park, Donggun ; Bui, Nguyen ; Hu, Chenming ; Yue, John
Author_Institution :
University of California at Berkeley
Keywords :
Current measurement; MOSFET circuits; Plasma applications; Plasma devices; Plasma measurements; Plasma simulation; Protection; Semiconductor diodes; Stress; Tunneling;
Conference_Titel :
Plasma Process-Induced Damage, 1996 1st International Symposium on
Print_ISBN :
0-9651577-0-9
DOI :
10.1109/PPID.1996.715195
