Method for detecting faults in FFUs using SDP based on audio signal analysis

Author

Shirai, Takuya ; Shibata, Katsuhiko ; Takahashi, Atsushi ; Mori, Kzuo ; Kasashima, Nagayoshi ; Ueno, Yoshifumi

Author_Institution

Takasago Thermal Eng. Co., Kanagawa, Japan

Volume

1

fYear

1996

fDate

18-21 Nov 1996

Firstpage

243

Abstract

A new method is developed for detecting irregularities of the rotational part in a clean room fan filter unit (FFU) by analyzing the FFU audio signals during the operating state. In general, irregular sounds from FFUs are intermixed with the blower and various extremely low S/N ratio, and thus, identification process difficult. Using a symmetrized dot pattern (SDP) technique, audio signals are analyzed; by comparing the snowflake-like noise pattern with normal patterns, irregularities can be identified with relative ease

Keywords

acoustic noise; acoustic signal processing; air conditioning; audio signals; clean rooms; failure analysis; fault diagnosis; integrated circuit technology; monitoring; semiconductor technology; FFU; SDP; audio signal analysis; blower; clean room fan filter unit; extremely low S/N ratio; fault detection; rotational part irregularities; snowflake-like noise pattern; symmetrized dot pattern technique; Acoustic noise; Condition monitoring; Fault detection; Filters; Gas detectors; Semiconductor device noise; Signal analysis; Signal processing; Signal to noise ratio; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Emerging Technologies and Factory Automation, 1996. EFTA '96. Proceedings., 1996 IEEE Conference on

Conference_Location

Kauai, HI

Print_ISBN

0-7803-3685-2

Type

conf

DOI

10.1109/ETFA.1996.573299

Filename

573299