DocumentCode

3069467

Title

Application of Plasma Charging Probe to Production HDP CVD Tool

Author

Roche, G.A. ; McVittie, J.P.

Author_Institution

Lam Research Corporation

fYear

1996

fDate

13-14 May 1996

Firstpage

71

Lastpage

74

Keywords

Current measurement; EPROM; Plasma applications; Plasma devices; Plasma measurements; Probes; Production; Radio frequency; Steady-state; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Process-Induced Damage, 1996 1st International Symposium on

Print_ISBN

0-9651577-0-9

Type

conf

DOI

10.1109/PPID.1996.715205

Filename

715205