Title :
Design of ZnO/SiO2/Si monolithic integrated programmable SAW filter
Author :
Dazhong, Zhu ; Xiaoxia, Hun ; Wei, Guo
Author_Institution :
Dept. of Inf. & Electr. Eng., Zhejiang Univ., Hangzhou, China
Abstract :
In this paper the design of a ZnO/SiO2/Si monolithic integrated programmable SAW filter is suggested. The input SAW interdigital transducer (IDT) and tap delay lines (TDL) are fabricated on ZnO/SiO2 structure. A NMOS-DMOS sampling, weighting, controlling and summing integrated circuit is designed compatibly in SiO 2/Si structure. This IC can control the IDT and TDL by programmable weighting signal to realize the shift of the central frequency of bandpass of this SAW filter
Keywords :
II-VI semiconductors; MOS integrated circuits; band-pass filters; elemental semiconductors; interdigital transducers; monolithic integrated circuits; silicon; silicon compounds; surface acoustic wave delay lines; surface acoustic wave filters; surface acoustic wave transducers; zinc compounds; NMOS-DMOS sampling circuit; ZnO-SiO2-Si; bandpass central frequency; interdigital transducer; monolithic integrated programmable SAW filter; programmable weighting; summing integrated circuit; tap delay lines; Acoustic waves; Bonding; Conductivity; Frequency; Packaging; Piezoelectric materials; SAW filters; Substrates; Surface acoustic wave devices; Zinc oxide;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location :
Beijing
Print_ISBN :
0-7803-4306-9
DOI :
10.1109/ICSICT.1998.786192
