Title :
Techniques for studying charging in plasma processing
Author :
Patrick, Roger ; Jones, Phillip
Author_Institution :
Lam Research Corporation
Keywords :
Monitoring; Phase change materials; Plasma applications; Plasma devices; Plasma materials processing; Plasma measurements; Probes; Radio frequency; Surface discharges; Voltage;
Conference_Titel :
Plasma Process-Induced Damage, 1996 1st International Symposium on
Conference_Location :
Santa Clara, CA, USA
Print_ISBN :
0-9651577-0-9
DOI :
10.1109/PPID.1996.715210
