DocumentCode
3070421
Title
Techniques for studying charging in plasma processing
Author
Patrick, Roger ; Jones, Phillip
Author_Institution
Lam Research Corporation
fYear
1996
fDate
14-14 May 1996
Firstpage
91
Lastpage
93
Keywords
Monitoring; Phase change materials; Plasma applications; Plasma devices; Plasma materials processing; Plasma measurements; Probes; Radio frequency; Surface discharges; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Process-Induced Damage, 1996 1st International Symposium on
Conference_Location
Santa Clara, CA, USA
Print_ISBN
0-9651577-0-9
Type
conf
DOI
10.1109/PPID.1996.715210
Filename
715210
Link To Document