DocumentCode
3071517
Title
Peculiarities of direct current vacuum-arc processes of DLC films deposition
Author
Strel´nitskij, V.E. ; Aksenov, I.I.
Author_Institution
NSC Kharkov Institute of Physics and Technology, Akademicheskaya Str. 1,61108 Kharkov, Ukraine
Volume
2
fYear
2004
fDate
Sept. 27 2004-Oct. 1 2004
Firstpage
461
Lastpage
466
Abstract
A brief analysis of plasma enhanced methods of diamond-like carbon films synthesis has been offered. The vacuum-arc method of synthesis of hydrogen free amorphous carbon allows to get films of this unique material with the highest physical-mechanical performances. Design peculiarities of vacuum arc plasma sources and high productive filter device for the amorphous carbon deposition has been discussed. Promising area of application of the DLC vacuum-are coating deposition processes has been considered.
Keywords
Amorphous materials; Coatings; Diamond-like carbon; Hydrogen; Ion sources; Organic materials; Plasma materials processing; Plasma sources; Production; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV. XXIst International Symposium on
Conference_Location
Yalta, Crimea
ISSN
1093-2941
Print_ISBN
0-7803-8461-X
Type
conf
DOI
10.1109/DEIV.2004.1422648
Filename
1422648
Link To Document