Title :
Investigation of metal evaporation and film deposition with a high voltage glow-discharge electron gun under middle vacuum
Author :
Melnyk, I.V. ; Melnyk, V.I. ; Porytskyy, P.V.
Author_Institution :
National Technical University of Ukraine, Kyiv Polytechnic Institute, Faculty of Electronic, Electronic Devices Dept., Pr. Peremogy, 37, Kyiv 03056, Ukraine
fDate :
Sept. 27 2004-Oct. 1 2004
Abstract :
The method of deposition of metals oxide and nitride coatings with using of glow discharge electron guns is discussed. Scheme of technological equipment to realising this process is represented and assignment of its major details is described. Technological parameters of elaborated equipment is pointed out. Mathematical model of realised technological process is proposed and obtained results of simulation is discussed and verified with experimental measurements.
Keywords :
Ceramics; Chemicals; Coatings; Electron beams; Electron guns; Gases; Glow discharges; Nuclear electronics; Surface discharges; Voltage;
Conference_Titel :
Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV. XXIst International Symposium on
Conference_Location :
Yalta, Crimea
Print_ISBN :
0-7803-8461-X
DOI :
10.1109/DEIV.2004.1422681
