Title :
Patterning And Growth Studies Of Nd-Fe-B-films
Author :
Lemke, H. ; Lang, T. ; Goddenhenrich, T. ; Heiden, C.
Author_Institution :
Inst. f. Angewandte Physik, Univ. Giessen
Keywords :
Chemicals; Coercive force; Magnetic films; Magnetic properties; Resists; Saturation magnetization; Sputtering; Substrates; Temperature; X-ray diffraction;
Conference_Titel :
Magnetics Conference, 1993. INTERMAG '93., Digest of International
Conference_Location :
Stockhom, Sweden
Print_ISBN :
0-7803-1310-0
DOI :
10.1109/INTMAG.1993.642013