Title :
Microelectromechanical systems (MEMS)
Author :
Gabriel, Dr Kaigham J
Author_Institution :
Electron. Technol. Office, Defense Adv. Res. Projects Agency, Arlington, VA, USA
Abstract :
The following topics are dealt with: MEMS fundamentals; MEMS fabrication technology; MEMS market and industry structure; defense applications; investment assessment; inertial measurement devices; multiple device chips; optical MEMS components; monolithic free-space optical disk pickup head; digital micromirror display; optomechanical displays; environmental monitoring sensors; wireless integrated microsensors; tactical remote sensors; mass spectrograph; miniature analytical instrumentation; microdisk arrays for data storage; multi-user MEMS projects; electronic design aids; fluid flow analysis; and MEMS technology trends
Keywords :
chemical sensors; display devices; micromechanical devices; microsensors; military equipment; optical disc storage; remote sensing; MEMS fabrication; data storage; defense applications; digital micromirror display; environmental monitoring sensors; fluid flow analysis; industry structure; inertial measurement; investment; market; mass spectrograph; microdisk arrays; miniature analytical instrumentation; monolithic free-space optical disk pickup head; multiple device chips; optical MEMS components; optomechanical displays; tactical remote sensor; wireless integrated microsensors; Displays; Integrated optics; Microelectromechanical systems; Micromechanical devices; Optical arrays; Optical device fabrication; Optical devices; Optical sensors; Remote monitoring; Sensor arrays;
Conference_Titel :
Aerospace Conference, 1997. Proceedings., IEEE
Conference_Location :
Snowmass at Aspen, CO
Print_ISBN :
0-7803-3741-7
DOI :
10.1109/AERO.1997.574849
