Microelectromechanical systems (MEMS)

Author

Gabriel, Dr Kaigham J

Author_Institution

Electron. Technol. Office, Defense Adv. Res. Projects Agency, Arlington, VA, USA

Volume

3

fYear

1997

fDate

1-8 Feb 1997

Firstpage

9

Abstract

The following topics are dealt with: MEMS fundamentals; MEMS fabrication technology; MEMS market and industry structure; defense applications; investment assessment; inertial measurement devices; multiple device chips; optical MEMS components; monolithic free-space optical disk pickup head; digital micromirror display; optomechanical displays; environmental monitoring sensors; wireless integrated microsensors; tactical remote sensors; mass spectrograph; miniature analytical instrumentation; microdisk arrays for data storage; multi-user MEMS projects; electronic design aids; fluid flow analysis; and MEMS technology trends

Keywords

chemical sensors; display devices; micromechanical devices; microsensors; military equipment; optical disc storage; remote sensing; MEMS fabrication; data storage; defense applications; digital micromirror display; environmental monitoring sensors; fluid flow analysis; industry structure; inertial measurement; investment; market; mass spectrograph; microdisk arrays; miniature analytical instrumentation; monolithic free-space optical disk pickup head; multiple device chips; optical MEMS components; optomechanical displays; tactical remote sensor; wireless integrated microsensors; Displays; Integrated optics; Microelectromechanical systems; Micromechanical devices; Optical arrays; Optical device fabrication; Optical devices; Optical sensors; Remote monitoring; Sensor arrays;

fLanguage

English

Publisher

ieee

Conference_Titel

Aerospace Conference, 1997. Proceedings., IEEE

Conference_Location

Snowmass at Aspen, CO

Print_ISBN

0-7803-3741-7

Type

conf

DOI

10.1109/AERO.1997.574849

Filename

574849