Title :
A Comparison Of Hot-electron And Fowler-nordheim Characterization Of Charging Events In A 0.5-μm Cmos Technology
Author :
Hook, T.B. ; Watson, K. ; Mittl, S. ; Johnson, C.
Author_Institution :
IBM Microelectronics Division
Keywords :
CMOS technology; Degradation; Hot carrier effects; Hot carriers; Monitoring; Production; Stress measurement; Testing; Threshold voltage; Time measurement;
Conference_Titel :
Plasma Process-Induced Damage, 1996 1st International Symposium on
Print_ISBN :
0-9651577-0-9
DOI :
10.1109/PPID.1996.715229