• DocumentCode
    3074024
  • Title

    Observation of Electrolurninescence and "Soft-breakdown" Effects in Sub-0.5/spl mu/m CMOS with Ultrathin Gate Oxides

  • Author

    Okandan, M. ; Fonash, Stephen J. ; Awadelkarim, O.O. ; Chan, Y.D.

  • Author_Institution
    Pennsylvania State University
  • fYear
    1996
  • fDate
    14-14 May 1996
  • Firstpage
    168
  • Lastpage
    170
  • Keywords
    Displays; Leakage current; Luminescence; MOS devices; MOSFETs; Microscopy; Plasma applications; Threshold voltage; Transconductance; Voltage control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Process-Induced Damage, 1996 1st International Symposium on
  • Conference_Location
    Santa Clara, CA, USA
  • Print_ISBN
    0-9651577-0-9
  • Type

    conf

  • DOI
    10.1109/PPID.1996.715230
  • Filename
    715230
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3074024