Title :
Progress of flat panel displays
Author :
Liu, Xianghuai ; Mao, Dongsheng
Author_Institution :
Inst. of Metall., Acad. Sinica, Shanghai, China
Abstract :
In this paper, hydrogen-free high sp3 content (>90%) diamond-like carbon (DLC) film was prepared by filtered arc deposition (FAD). Its electron field emission behavior and fluorescent displays are tested by using a simple diode structure. Emission current is 0.9 μA at electric field as low as 1 V/μm, and emission current density can be obtained about 5 mA/cm2 at electric field as low as 20 V/μm. Field emission current is stable. Uniform fluorescence display of electron emission from a DLC film under electric field of 12 V/μm was also obtained. It can be considered that the contribution of the fine electron emission properties results from the smooth surface and high sp3 content. A DLC column micro-emitter array was also fabricated by ion beam etching
Keywords :
arrays; carbon; current density; field emission displays; flat panel displays; plasma arc spraying; sputter etching; 0.9 muA; C; H-free film; column micro-emitter array; diamond-like carbon film; diode structure; electron field emission; emission current density; filtered arc deposition; flat panel displays; fluorescent displays; ion beam etching; smooth surface; sp3 content; Atomic force microscopy; Diamond-like carbon; Diodes; Electron emission; Flat panel displays; Fluorescence; Ion beams; Phosphors; Substrates; Testing;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location :
Beijing
Print_ISBN :
0-7803-4306-9
DOI :
10.1109/ICSICT.1998.786452
