Title :
Silicon-silica monolithic photonic integration platform for telecommunications applications
Author :
Yamada, K. ; Tsuchizawa, T. ; Nishi, H. ; Kou, R. ; Shinojima, H. ; Fukuda, H. ; Hiraki, T. ; Ishikawa, Y. ; Wada, K.
Author_Institution :
NTT Microsyst. Integration Labs., NTT Corp., Atsugi, Japan
Abstract :
For telecommunications applications of highly-integrated silicon-based photonic devices, we have developed a silicon-silica monolithic photonic platform, in which high performance silica-based passive devices and compact, high-speed silicon-based dynamic/active devices can be monolithically integrated.
Keywords :
elemental semiconductors; integrated optics; optical communication; silicon; silicon compounds; Si-SiO2; compact high-speed silicon-based dynamic-active devices; high performance silica-based passive devices; highly-integrated silicon-based photonic devices; silicon-silica monolithic photonic integration platform; telecommunication applications; Monolithic integrated circuits; Optical waveguides; Photonics; Silicon; Silicon compounds; Telecommunications; Wires;
Conference_Titel :
Opto-Electronics and Communications Conference (OECC), 2012 17th
Conference_Location :
Busan
Print_ISBN :
978-1-4673-0976-9
Electronic_ISBN :
2166-8884
DOI :
10.1109/OECC.2012.6276384
