Title :
Achievements of China National Climbing Project “micro-electro-mechanical systems, 1994-1998”
Author_Institution :
Inst. of Metall., Acad. Sinica, Shanghai, China
Abstract :
In this paper, we review the achievements of the China National Climbing Project “MEMS, 1994-1998”. Topics covered are diamond film deposition and precise pattern technology, mask-maskless etching technology, LIGA, laser-LIGA and self-aligned quasi-LIGA technology; three kinds of micromotors, including poly-Si and Ni electrostatic micromotors, PZT piezoelectric film micromotors and electromagnetic micromotors; force-balanced accelerometers, micropumps and vibratory gyroscopes; systems for cell operation, micropart assembling, visualization of micropumps and micromotors, and vibration frequency measurement
Keywords :
LIGA; accelerometers; electrostatic motors; etching; gyroscopes; micromachining; micromechanical devices; micropumps; microsensors; rapid prototyping (industrial); reviews; vibration measurement; China National Climbing Project; LIGA technology; MEMS; Ni; Ni electrostatic micromotors; PZT; PbZrO3TiO3; Si; cell operation; diamond films deposition; electromagnetic micromotors; force-balanced accelerometers; laser-LIGA; mask-maskless etching technology; micromachining; micropart assembling; micropumps; optical fiber Michelson interferometer; piezoelectric film micromotors; polysilicon micromotors; precise pattern technology; rapid prototyping; self-aligned quasi-LIGA; vibration frequency measurement; vibratory gyroscopes; virtual reality technology; visualization; Accelerometers; Assembly systems; Electromagnetic forces; Electrostatics; Etching; Gyroscopes; Micromotors; Micropumps; Piezoelectric films; Visualization;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location :
Beijing
Print_ISBN :
0-7803-4306-9
DOI :
10.1109/ICSICT.1998.786494
