Achievements of China National Climbing Project “micro-electro-mechanical systems, 1994-1998”

Author

Wang, Weiyuan

Author_Institution

Inst. of Metall., Acad. Sinica, Shanghai, China

fYear

1998

fDate

1998

Firstpage

870

Lastpage

874

Abstract

In this paper, we review the achievements of the China National Climbing Project “MEMS, 1994-1998”. Topics covered are diamond film deposition and precise pattern technology, mask-maskless etching technology, LIGA, laser-LIGA and self-aligned quasi-LIGA technology; three kinds of micromotors, including poly-Si and Ni electrostatic micromotors, PZT piezoelectric film micromotors and electromagnetic micromotors; force-balanced accelerometers, micropumps and vibratory gyroscopes; systems for cell operation, micropart assembling, visualization of micropumps and micromotors, and vibration frequency measurement

Keywords

LIGA; accelerometers; electrostatic motors; etching; gyroscopes; micromachining; micromechanical devices; micropumps; microsensors; rapid prototyping (industrial); reviews; vibration measurement; China National Climbing Project; LIGA technology; MEMS; Ni; Ni electrostatic micromotors; PZT; PbZrO3TiO3; Si; cell operation; diamond films deposition; electromagnetic micromotors; force-balanced accelerometers; laser-LIGA; mask-maskless etching technology; micromachining; micropart assembling; micropumps; optical fiber Michelson interferometer; piezoelectric film micromotors; polysilicon micromotors; precise pattern technology; rapid prototyping; self-aligned quasi-LIGA; vibration frequency measurement; vibratory gyroscopes; virtual reality technology; visualization; Accelerometers; Assembly systems; Electromagnetic forces; Electrostatics; Etching; Gyroscopes; Micromotors; Micropumps; Piezoelectric films; Visualization;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on

Conference_Location

Beijing

Print_ISBN

0-7803-4306-9

Type

conf

DOI

10.1109/ICSICT.1998.786494

Filename

786494