Title :
MEMS developments in Tsinghua University
Author :
Litian, Liu ; Zhijian, Li
Author_Institution :
Tsinghua Univ., Beijing, China
Abstract :
This article introduces MEMS development in the Institute of Microelectronic at Tsinghua University. Several MEMS devices: smart sensors, micromotors, micropump and microphone are described
Keywords :
LIGA; accelerometers; capacitive sensors; diaphragms; etching; intelligent sensors; microactuators; micromachining; micromechanical devices; micromotors; microphones; micropumps; microsensors; piezoresistive devices; pressure sensors; reviews; LIGA; MEMS development; array CMOS magnetic field sensor; array tactile sensor; capacitive accelerometer; condenser microphone; diaphragms; integrated sensors; micro flowmeter; micromachining; micromotors; micropump; microsystems; piezoresistive devices; pressure sensor; smart sensors; system chip; wobble motor; CMOS technology; Integrated circuit technology; Intelligent sensors; Magnetic sensors; Micromechanical devices; Microphones; Sensor arrays; Sensor phenomena and characterization; Silicon; Tactile sensors;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location :
Beijing
Print_ISBN :
0-7803-4306-9
DOI :
10.1109/ICSICT.1998.786495
