Contactless angle measurement by CMOS process with on chip interface circuit

Contactless magnetic-sensitive two-dimensional angle detector systems can be used in harsh environments when longer operating lifetime and better reliability are required. On a single chip wafer, we have designed and fabricated several kind of detector systems to find out the better way with the industrial CMOS process. One kind is based on four Hall devices; the other kind is based on the lateral magnetotransistor. A new system is developed which takes advantage of both these systems. Through system test, we have found the favorable features of these above systems