The study of single-chip integrated microfluidic system

A novel single-chip integrated microfluidic system is presented. After 3D structures are formed with deep cavities and stiff mechanical membrane as sealing layer in single-chip, additional standard IC processes are applied to achieve single-chip integrated microfluidic systems, including micropumps, valves, channels, cavities and some different sensors. We have applied different principles, bimetallic and electrostatic driving, to the driving and control of the micropumps and microvalves. The final micropump driving membrane is 1 mm×1 mm×2 μm and the valve membrane is 6 mm×0.6 mm×2 μm. Preliminary experiments show that the on/off flow ratio of the integrated micropump is 180. The results of the sensitivity and the temperature coefficient of the sensors are also reported