Title :
Thermally excited micromechanical vacuum resonator
Author :
Yaqiang, Wang ; Zhonghe, Jin ; Yuelin, Wang ; Chun, Ding
Author_Institution :
Dept. of Inf. & Electron. Eng., Zhejiang Univ., Hangzhou, China
Abstract :
A micromechanical resonator is proposed and realized. It consists of a single-crystal silicon beam and two P-type silicon resistors. One resistor is used to excite the vibrating beam and the other to sense vibration of the beam. The dimensions of the resonator are about 4×2.5 mm2, the resonant frequency is about 7.8 KHz, Q factor about 190 in air and above 2500 in vacuum degree of 7.5×10 -4 Pa. The theory of thermal excitation is analyzed and the characteristics of the resonator are tested. We conclude that the resonator can be applied to vacuum measurement by the means of closed-loop resonating circuit. The design and realization of the circuit are described
Keywords :
etching; frequency response; micromachining; micromechanical resonators; microsensors; vacuum measurement; vibrations; 2.5 mm; 4 mm; 7.5E-4 Pa; 7.8 kHz; P-type silicon resistors; Q factor; Si; anisotropic etching; cantilever beam; closed-loop resonating circuit; frequency response; micromechanical vacuum resonator; process flow; single-crystal silicon beam; thermally excited; vacuum measurement; Circuits; Etching; Fluid flow measurement; Frequency measurement; Heating; Lithography; Micromechanical devices; Q factor; Resistors; Silicon;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location :
Beijing
Print_ISBN :
0-7803-4306-9
DOI :
10.1109/ICSICT.1998.786540
