Title :
3-D MEMS VOA using electromagnetic and electrothermal actuations
Author :
Kah How Koh ; Chengkuo Lee
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
An aluminum-coated CMOS compatible silicon micromirror for variable optical attenuation in a three-dimensional free space arrangement has been characterized in terms of hybrid actuation mechanism which combines electromagnetic and electrothermal actuators.
Keywords :
CMOS integrated circuits; aluminium; electromagnetic actuators; elemental semiconductors; integrated optoelectronics; micro-optomechanical devices; microactuators; micromirrors; optical attenuators; silicon; 3D MEMS VOA; Al-Si; aluminum-coated CMOS compatible silicon micromirror; electromagnetic actuation; electromagnetic actuators; electrothermal actuation; electrothermal actuators; hybrid actuation mechanism; three-dimensional free space arrangement; variable optical attenuation; Actuators; Attenuation; Coils; Laser beams; Micromechanical devices; Mirrors; Optical attenuators;
Conference_Titel :
Opto-Electronics and Communications Conference (OECC), 2012 17th
Conference_Location :
Busan
Print_ISBN :
978-1-4673-0976-9
Electronic_ISBN :
2166-8884
DOI :
10.1109/OECC.2012.6276467
