DocumentCode
3076234
Title
Segregation Structure Of Bias-sputtered CoCr/Cr And CoCrTa/Cr Films
Author
Okumura, Y. ; Morita, H. ; Fujimori, H. ; Yang, X.B. ; Endo, I.
Author_Institution
KUBOTA Corp., Hard Disk Division, Itami, Hyogo 664, Japan
fYear
1993
fDate
13-16 April 1993
Keywords
Chromium alloys; Coercive force; Magnetic films; Magnetic properties; Scanning electron microscopy; Sputter etching; Sputtering; Substrates; Surface morphology; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 1993. INTERMAG '93., Digest of International
Conference_Location
Stockhom, Sweden
Print_ISBN
0-7803-1310-0
Type
conf
DOI
10.1109/INTMAG.1993.642042
Filename
642042
Link To Document