• DocumentCode
    3076561
  • Title

    Current profiling for μm-class planar circuit patterns by fiber-edge magneto-optic probe

  • Author

    Sato, T. ; Iwanami, M. ; Hoshino, S. ; Kishi, M. ; Tsuchiya, M.

  • Author_Institution
    Association of Super-Advanced Electron. Technol., Tsukuba, Japan
  • fYear
    2003
  • fDate
    10-12 Sept. 2003
  • Firstpage
    341
  • Lastpage
    344
  • Abstract
    Inversion method of Biot-Savart´s law has been successfully applied to one-dimensional current profiling for μm-class planar circuits. Indispensable is to use a fiber-edge magneto-optic probe of high spatial resolution and high DUT-accessibility.
  • Keywords
    electric current measurement; fibre optic sensors; magneto-optical sensors; μm-class planar circuit patterns; DUT; current profiling; fiber-edge magneto-optic probe; inversion method of Biot-Savart law; Bandwidth; Frequency; Magnetic circuits; Magnetic field measurement; Magnetic heads; Optical fiber polarization; Optical imaging; Probes; SQUIDs; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Photonics, 2003. MWP 2003 Proceedings. International Topical Meeting on
  • Print_ISBN
    0-7803-8691-4
  • Type

    conf

  • DOI
    10.1109/MWP.2003.1422914
  • Filename
    1422914
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3076561