Modal Control of Mechanically Coupled NEMS Array for Tunable Oscillators

A new approach for a digital frequency tuning of NEMS-based oscillators in radio frequency (RF) applications is described. It is based on the modal control of mechanically coupled nanoelectromechanical systems (NEMS) array for which the collective behavior is described by discrete modal analysis. By controlling the electrodes bias voltages distribution, the different transduction gains of the array are adjusted proportionally to specific modal vectors making the whole system operate as one single resonator on the corresponding mode which allows tuning the global oscillator frequency in a large frequency range depending on the coupling stiffness and the resonators number. Besides, by collecting the projected outputs in a common load, the power handling ability of the whole device is raised in all channels improving the phase noise performance of the oscillator.