Title :
System Configuration and Fabrication Technology for Distributed MEMS
Author :
Fujita, Hiroyuki ; Ataka, Manabu
Author_Institution :
Inst. of Ind. Sci., Univ. of Tokyo Tokyo, Tokyo, Japan
Abstract :
The system configuration and printing-based fabrication technology of distributed MEMS are discussed using our research trials related to those aspects. Based on the concept of autonomous distributed system (ADS), we have constructed and operated a smart conveyer using micro nozzle arrays. We also applied printing technology to fabricate a kind of distributed MEMS, i.e. a flexible display consisting of movable Fabry-Perot interferometers.
Keywords :
Actuators; Control systems; Distributed control; Fabrication; Microactuators; Micromechanical devices; Printing; Robotics and automation; Sensor arrays; Silicon; MEMS; autonoous distributed system; component; flexibile display; micro actuator; printing; smart surface;
Conference_Titel :
Hardware and Software Implementation and Control of Distributed MEMS (DMEMS), 2010 First Workshop on
Conference_Location :
Besan, TBD, France
Print_ISBN :
978-1-4244-7222-2
Electronic_ISBN :
978-1-4244-7223-9
DOI :
10.1109/dMEMS.2010.23
