Title :
Fatigue characteristics of PZT capacitors with Ir/IrOx electrodes
Author :
Hase, T. ; Noguchi, T. ; Takemura, K. ; Miyasaka, Y.
Author_Institution :
Functional Mater. Res. Labs., NEC Corp., Kawasaki, Japan
Abstract :
Fatigue characteristics of PZT capacitors with Ir/IrOx electrodes were investigated. The top and bottom Ir/IrOx electrodes prevented PZT capacitors from polarization fatigue up to 1011 cycles. This fact was explained by the assumption that the Ir/IrOx electrodes suppress the formation of two kinds of domain pinning sites at the PZT/electrode interfaces. These pinning sites would originate from oxygen vacancies. The PZT with Ti-rich composition would enhance the formation of the pinning sites
Keywords :
dielectric polarisation; electric domains; ferroelectric capacitors; ferroelectric materials; ferroelectric thin films; iridium; iridium compounds; lead compounds; thin film capacitors; vacancies (crystal); Ir; Ir/IrOx electrodes; IrO; PZT; PZT capacitors; PZT/electrode interfaces; PbZrO3TiO3; Ti-rich composition; domain pinning sites; fatigue characteristics; ferroelectric; oxygen vacancies; polarization fatigue; Argon; Capacitors; Electrodes; Fatigue; Ferroelectric materials; Lead; Polarization; Sputtering; Substrates; Zirconium;
Conference_Titel :
Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
Conference_Location :
Montreux
Print_ISBN :
0-7803-4959-8
DOI :
10.1109/ISAF.1998.786623
