DocumentCode :
3076902
Title :
Thick film sol gel PZT transducer using dip coating
Author :
Gentry, Kenneth L. ; Zara, Jason M. ; Bu, Sang-Don ; Eom, Chang-Beom ; Smith, Stephen W.
Author_Institution :
Dept. of Biomed. Eng., Duke Univ., Durham, NC, USA
Volume :
2
fYear :
2000
fDate :
36800
Firstpage :
977
Abstract :
A sol gel process has been used to develop a 30 μm thick PZT coating on a sapphire wafer. The sol gel film was removed and plated with platinum electrodes. The free-standing film had a free dielectric constant (εT) of 820, a thickness-mode coupling coefficient (kt) of 0.17, a speed of sound (c) of 3700 m/s, and an acoustic impedance (Z) of 28.9 MRayls. The film resonated at 62 MHz. These results were similar to KLM simulation results. A sol gel transducer was built by first backing the film with 2.2 mm thick silver epoxy. The transducer resonated at 32, 64, and 92 MHz. At 32 MHz, the transducer had a bandwidth of 40%. The insertion loss at 47 MHz was -66 dB. A 32 MHz image was constructed with this transducer by off-line processing of 40 rf-lines of data
Keywords :
acoustic impedance; biomedical transducers; biomedical ultrasonics; lead compounds; permittivity; piezoceramics; piezoelectric transducers; sol-gel processing; thick films; ultrasonic transducers; 30 micron; 32 to 92 MHz; KLM simulation; PZT; PZT coating; PbZrO3TiO3; US imaging; US transducer; acoustic impedance; dip coating; free dielectric constant; freestanding film; impulse response; insertion loss; off-line processing; platinum electrodes; pulse-echo mode; sapphire wafer; speed of sound; thick film sol gel process; thickness-mode coupling coefficient; Acoustic transducers; Bandwidth; Dielectric constant; Dip coating; Electrodes; Impedance; Insertion loss; Platinum; Silver; Thick films;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2000 IEEE
Conference_Location :
San Juan
ISSN :
1051-0117
Print_ISBN :
0-7803-6365-5
Type :
conf
DOI :
10.1109/ULTSYM.2000.921488
Filename :
921488
Link To Document :
بازگشت