Title :
Piezoelectric thick film ultrasonic transducers fabricated by a spray technique
Author :
Kobayashi, M. ; Olding, T.R. ; Zou, L. ; Sayer, M. ; Jen, C.K. ; Rehman, A.U.
Author_Institution :
Dept. of ECE, McGill Univ., Montreal, Que., Canada
Abstract :
Thick film broadband ultrasonic transducers (UTs) produced using sol-gel spray technique, operating below 10 MHz are presented. These UTs are formed by dispersing PZT and LiTaO3 particles, respectively in Al2O3 and PZT sol-gel solution. The 50-100 μm thick films have been deposited on curved steel, flat steel and aluminum substrates and steel rods. Ultrasonic pulse-echo signals with a signal to noise ratio of more than 25 dB are experimentally obtained for the operating temperatures up to 250°C
Keywords :
alumina; composite materials; lanthanum compounds; lead compounds; piezoceramics; piezoelectric transducers; powder technology; sol-gel processing; spray coating techniques; thick film devices; thick films; ultrasonic transducers; 50 to 100 micron; Al2O3; LiTaO3; PZT; PZT-Al2O3; PZT-LiTaO3; PbZrO3TiO3; PbZrO3TiO3-Al2O3; PbZrO3TiO3-LiTaO3; aluminum substrate; broadband ultrasonic transducers; composite film; curved steel substrate; drying; firing; flat steel substrate; piezoelectric powders; piezoelectric transducers; sol-gel spray technique; steel rod substrate; thick film ultrasonic transducers; ultrasonic pulse-echo signals; Aluminum; Annealing; Coatings; Piezoelectric films; Powders; Spraying; Steel; Temperature; Thick films; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2000 IEEE
Conference_Location :
San Juan
Print_ISBN :
0-7803-6365-5
DOI :
10.1109/ULTSYM.2000.921490
