Title :
Selective area preparation of PZT discs and their ultrasonic applications
Author :
Omori, Tatsuya ; Suzuki, Takashi ; Hashimoto, Ken-Ya ; Yamaguchi, Masatsune
Author_Institution :
Dept. of Electron. & Mech. Eng., Chiba Univ., Japan
Abstract :
This paper describes a modified sol-gel method to prepare PZT discs of nearly 1 μm thickness without repeating any spin-coating and prebaking processes. In the method, PZT precursor-gel discs having a small area are formed out of precursor-sol prior to sintering. This is carried out by pouring the precursor-sol into a ZnO mold. Ultrasonic transducers were fabricated using the PZT discs and their piezoelectricity in GHz ranges were discussed
Keywords :
frequency response; lead compounds; moulding; piezoceramics; piezoelectric transducers; sintering; sol-gel processing; spin coating; ultrasonic transducers; 1 micron; PZT; PbZrO3TiO3; US transducers; frequency response; modified sol-gel method; molding; piezoelectric discs; piezoelectric properties; precursor-gel discs; pulse echo response; selective area preparation; sintering; spin coating; Acoustic applications; Chemicals; Circuits; Etching; Lithography; Mechanical engineering; Piezoelectric films; Piezoelectricity; Titanium compounds; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 2000 IEEE
Conference_Location :
San Juan
Print_ISBN :
0-7803-6365-5
DOI :
10.1109/ULTSYM.2000.921491
