Title :
A new characterization of piezoelectric thin films
Author :
Kim, Dong-Guk ; Kim, Ho-Gi
Author_Institution :
Dept. of Mater. Sci. & Eng., Korea Adv. Inst. of Sci. & Technol., Taejeon, South Korea
Abstract :
With the meditation for the measuring philosophy of normal loading method, piezoelectric properties of lead zirconate titanate thin film were investigated by pneumatic loading method, which is newly devised for more improved and reliable characterization technique. These results will be utilized to the piezoelectric micro-devices and give us more reliable expectation for the device performance and better understanding of piezoelectric thin film
Keywords :
dielectric hysteresis; dielectric polarisation; lead compounds; piezoelectric materials; piezoelectric thin films; PZT; PbZrO3TiO3; device performance; lead zirconate titanate thin film; measuring philosophy; normal loading method; piezoelectric micro-devices; piezoelectric thin films; pneumatic loading method; Ferroelectric materials; Hysteresis; Materials science and technology; Optical films; Piezoelectric effect; Piezoelectric films; Silicon; Substrates; Titanium compounds; Voltage;
Conference_Titel :
Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
Conference_Location :
Montreux
Print_ISBN :
0-7803-4959-8
DOI :
10.1109/ISAF.1998.786637
