DocumentCode
3077278
Title
Electrical characterization of ferroelectric YMnO3 films for MF(I)S-FET application
Author
Fujimura, Norifumi ; Yoshimura, Takeshi ; Ito, Taichiro
Author_Institution
Coll. of Eng., Osaka Prefecture Univ., Japan
fYear
1998
fDate
1998
Firstpage
81
Lastpage
84
Abstract
As a new ferroelectric material especially for MFSFET´s, we have proposed REMnO3 (RE:rare earth element), and succeeded to obtain epitaxial films on sapphire and MgO, and oriented films on Pt/sapphire and Si using YMnO3 (YMO). The most recent paper described that the YMO on Si with Y-Mn-O buffer layer showed distinct ferroelectric C-V hysteresis with the memory window of 1.1 V, however, the C-V behavior had strong sweeping rate dependence. This paper discusses why the YMO/Si with Y-Mn-O buffer layer shows poor ferroelectric properties, and also shows the improvement of the properties YMO by using Y2O3 buffer layer
Keywords
MISFET; dielectric hysteresis; ferroelectric materials; ferroelectric thin films; yttrium compounds; 1.1 V; Al2O3; C-V behavior; MF(I)S-FET application; MFSFET; MgO; REMnO3; YMnO3; electrical characterization; epitaxial films; ferroelectric YMnO3 films; oriented films; strong sweeping rate dependence; Buffer layers; Capacitance-voltage characteristics; Dielectric measurements; Electrodes; Ferroelectric films; Ferroelectric materials; Hysteresis; Performance evaluation; Polarization; Semiconductor films;
fLanguage
English
Publisher
ieee
Conference_Titel
Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
Conference_Location
Montreux
ISSN
1099-4734
Print_ISBN
0-7803-4959-8
Type
conf
DOI
10.1109/ISAF.1998.786641
Filename
786641
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