• DocumentCode
    3077278
  • Title

    Electrical characterization of ferroelectric YMnO3 films for MF(I)S-FET application

  • Author

    Fujimura, Norifumi ; Yoshimura, Takeshi ; Ito, Taichiro

  • Author_Institution
    Coll. of Eng., Osaka Prefecture Univ., Japan
  • fYear
    1998
  • fDate
    1998
  • Firstpage
    81
  • Lastpage
    84
  • Abstract
    As a new ferroelectric material especially for MFSFET´s, we have proposed REMnO3 (RE:rare earth element), and succeeded to obtain epitaxial films on sapphire and MgO, and oriented films on Pt/sapphire and Si using YMnO3 (YMO). The most recent paper described that the YMO on Si with Y-Mn-O buffer layer showed distinct ferroelectric C-V hysteresis with the memory window of 1.1 V, however, the C-V behavior had strong sweeping rate dependence. This paper discusses why the YMO/Si with Y-Mn-O buffer layer shows poor ferroelectric properties, and also shows the improvement of the properties YMO by using Y2O3 buffer layer
  • Keywords
    MISFET; dielectric hysteresis; ferroelectric materials; ferroelectric thin films; yttrium compounds; 1.1 V; Al2O3; C-V behavior; MF(I)S-FET application; MFSFET; MgO; REMnO3; YMnO3; electrical characterization; epitaxial films; ferroelectric YMnO3 films; oriented films; strong sweeping rate dependence; Buffer layers; Capacitance-voltage characteristics; Dielectric measurements; Electrodes; Ferroelectric films; Ferroelectric materials; Hysteresis; Performance evaluation; Polarization; Semiconductor films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
  • Conference_Location
    Montreux
  • ISSN
    1099-4734
  • Print_ISBN
    0-7803-4959-8
  • Type

    conf

  • DOI
    10.1109/ISAF.1998.786641
  • Filename
    786641