Title :
Sol-gel PTC BaTiO3 thin films: application of PTC film to heater plate
Author :
Ogawa, T. ; Sugiyama, O. ; Saitoh, S. ; Miyahara, S. ; Akahori, A. ; Yajima, M. ; Masuda, H. ; Satoh, K. ; Satoh, H. ; Kobayashi, M. ; Nozaki, K.
Author_Institution :
Shizuoka Inst. of Sci. & Technol., Fukuroi, Japan
Abstract :
PTC BaTiO3 (BT) thin films were fabricated to apply to a heater plate. BT sol solutions composed of barium acetate and titanium-tetrabutoxide were prepared in a mixture of glycerine, methanol and acetic acid. The small amounts of donor (La), acceptor (Mn) and sintering aid (Si) were added to the BT sol solutions. In this study, we found out that the fabrication conditions of the sol-gel PTC BT thin films for heater devices were as follows: (1) the sol compositions available for PTC films, (2) the substrates which don´t react with the films such as high purity BT ceramics, (3) relatively high firing temperatures to crystallize the tetragonal phase, (4) coarse grains (20-80 μm), and (5) the film thickness of 2-4 μm for the film heaters which showed high response to temperature change and uniform heating
Keywords :
barium compounds; ferroelectric ceramics; ferroelectric thin films; grain size; lanthanum; manganese; silicon; sintering; sol-gel processing; 2 to 4 mum; 20 to 80 mum; BaTiO3:La,Mn,Si; La; Mn; PTC film; Si; acceptor; acetic acid; barium acetate; coarse grains; donor; film thickness; firing temperatures; glycerine; heater plate; high purity BT ceramics; methanol; sintering aid; sol solutions; sol-gel PTC BT thin films; sol-gel PTC BaTiO3 thin films; tetragonal phase; titanium-tetrabutoxide; Barium; Ceramics; Crystallization; Fabrication; Firing; Methanol; Substrates; Temperature; Thin film devices; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
Conference_Location :
Montreux
Print_ISBN :
0-7803-4959-8
DOI :
10.1109/ISAF.1998.786646
