• DocumentCode
    3077495
  • Title

    Electrical characteristics of the PZT capacitors using Ir electrodes

  • Author

    Kondo, K. ; Takai, K. ; Matsuura, K. ; Tamura, T. ; Ashida, H. ; Otani, S.

  • Author_Institution
    ULSI Dev. Div., Fujitsu Ltd., Kawasaki, Japan
  • fYear
    1998
  • fDate
    1998
  • Firstpage
    125
  • Lastpage
    128
  • Abstract
    Pt/IrO2 electrodes for sol-gel PbZrxTi1-xO3 (PZT) capacitors were studied. The morphology, stress, and adhesion of the IrO2 layer depended upon the sputter conditions. The electrical characteristics of the capacitor changed with the morphology of IrO2
  • Keywords
    adhesion; ceramic capacitors; ferroelectric capacitors; iridium compounds; lead compounds; platinum; sputtered coatings; zirconium compounds; Ir electrodes; PZT capacitors; PbZrxTi1-xO3 capacitors; Pt-IrO2-PbZrO3TiO3; Pt-IrO2-PZT; adhesion; electrical characteristics; morphology; sputter conditions; stress; Capacitors; Electric variables; Electrodes; Ferroelectric films; Ferroelectric materials; Morphology; Nonvolatile memory; Random access memory; Scanning electron microscopy; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
  • Conference_Location
    Montreux
  • ISSN
    1099-4734
  • Print_ISBN
    0-7803-4959-8
  • Type

    conf

  • DOI
    10.1109/ISAF.1998.786652
  • Filename
    786652
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3077495