Title :
Preparation of La-modified Sr0.5Ba0.5Nb2 O6 ferroelectric thin films for dielectric-bolometer-based infrared image sensor
Author :
Xu, H. ; Kubo, R. ; Yoshino, Y. ; Hashimoto, K. ; Noda, M. ; Okuyama, M.
Author_Institution :
Graduate Sch. of Eng. Sci., Osaka Univ., Japan
Abstract :
Infrared sensitivity performances of ferroelectric bolometer have been evaluated from the principle point of view. La-modified Sr0.5 Ba0.5Nb2O6 (SBN) films have been prepared on Pt/Ti/SiO2/Si by pulsed laser deposition with a special reference to develop dielectric-bolometer-based thermal image array sensors. (001)-oriented Sr0.48Ba0.51La0.01Nb2O6 , and Sr0.5Ba0.5Nb2O6:2%La2 O3 films were obtained when using ambient N2O, both the films have slim P-E hysteresis loops at room temperature. Typically for Sr0.48Ba0.51La0.01 Nb2O6, the dielectric constant increases at an average rate of 60 K-1 in the range of 30°C-50°C
Keywords :
barium compounds; bolometers; ferroelectric devices; ferroelectric materials; ferroelectric thin films; infrared detectors; lanthanum; pulsed laser deposition; strontium compounds; 30 to 50 C; La-modified Sr0.5Ba0.5Nb2O6 ferroelectric thin films; Sr0.48Ba0.51La0.01Nb2 O6; Sr0.5Ba0.5Nb2O6:2%La 2O3; Sr0.5Ba0.5Nb2O6:La 2O3; dielectric constant; dielectric-bolometer-based infrared image sensor; pulsed laser deposition; slim P-E hysteresis loops; thermal image array sensors; Bolometers; Ferroelectric films; Ferroelectric materials; Niobium; Optical pulses; Performance evaluation; Pulsed laser deposition; Semiconductor films; Sensor arrays; Strontium;
Conference_Titel :
Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
Conference_Location :
Montreux
Print_ISBN :
0-7803-4959-8
DOI :
10.1109/ISAF.1998.786664
