Title :
The spatial distribution of polarization and space charge in sputtered PZT thin films
Author :
Suchaneck, G. ; Sandner, Th ; Köhler, R. ; Padmini, P. ; Gerlach, G. ; Afanasjev, V.P. ; Tarakanov, E.A.
Author_Institution :
Inst. for Solid State Electron., Tech. Univ. Dresden, Germany
Abstract :
In this work, the laser-intensity-modulation method (LIMM), e.g. the measurement of a pyroelectric current caused by the interaction of thermal waves generated by an intensity modulated laser and the spatially distributed polarization and space charge, and capacitance-voltage characteristics are used for a separate polarization and space charge determination for sputtered PZT films. Assumptions concerning the nature of the space charge centers were made
Keywords :
dielectric polarisation; ferroelectric materials; ferroelectric thin films; lead compounds; space charge; sputtered coatings; PZT; PbZrO3TiO3; capacitance-voltage characteristics; intensity modulated laser; laser-intensity-modulation method; polarization; pyroelectric current; space charge; spatial distribution; sputtered PZT thin films; thermal waves; Capacitance-voltage characteristics; Ceramics; Polarization; Pyroelectricity; Semiconductor thin films; Space charge; Sputtering; Substrates; Temperature; Thin film sensors;
Conference_Titel :
Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
Conference_Location :
Montreux
Print_ISBN :
0-7803-4959-8
DOI :
10.1109/ISAF.1998.786666
