Oxide thin film heterostructure IR detector

Pyroelectric Mn and Sb doped-Pb(Zr,Ti)O₃(PMSZT)/YBa₂Cu₃O _7-y (YBCO) thin film heterostructure has been integrated with Si using a YSZ buffer layer. Their pyroelectric properties and IR responsivity have been studied. Doping of the PZT with Mn and Sb was used to tune the ferroelectric transition temperatures to lower values, and hence to modify the pyroelectric and dielectric properties of the pyroelectric materials. PMSZT thin films show a high pyroelectric coefficient p of 45 nC/cm²K, and high figures of merit for the PMSZT/YBCO heterostructure, F_i of 15.3×10^-9 C·cm/J, F_v of 1768 cm²/C and F_d of 0.048 (cm³/J)^1/2 at 25°C. Enhancement of detectivity was attempted by integrating a YBCO air-bridge into the detector design for increased thermal isolation of the detector from the substrate