Response of thin film pyroelectric sensors

Author

Chang, Dong Hoon ; Kang, Seong Jun ; Yoon, Yung Sup

Author_Institution

Sch. of Electr. & Comput. Eng., Inha Univ., Inchon, South Korea

fYear

1998

fDate

1998

Firstpage

213

Lastpage

216

Abstract

The pyroelectric response of detectors with a lead-lanthanum-titanate (PLT) sensing element on either a Si and a SiO ₂ substrate are calculated as functions of the pyroelectric layer and the underlying layer thicknesses. It is found that the detector with an air gap has a frequency-independent responsivity over a wide frequency range. A correlation is found between the type of frequency response in each frequency region and the corresponding dominant mechanism for heat loss

Keywords

ferroelectric materials; ferroelectric thin films; lanthanum compounds; lead compounds; pyroelectric detectors; PbLaTiO₃; Si; Si substrate; SiO₂; SiO₂ substrate; air gap; detectors; frequency response; frequency-independent responsivity; heat loss; layer thickness; lead-lanthanum-titanate; pyroelectric layer; pyroelectric response; response; thin film pyroelectric sensors; Detectors; Dielectric materials; Frequency; Nonhomogeneous media; Pyroelectricity; Substrates; Temperature distribution; Thermal conductivity; Thin film sensors; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on

Conference_Location

Montreux

ISSN

1099-4734

Print_ISBN

0-7803-4959-8

Type

conf

DOI

10.1109/ISAF.1998.786673

Filename

786673