Title :
Response of thin film pyroelectric sensors
Author :
Chang, Dong Hoon ; Kang, Seong Jun ; Yoon, Yung Sup
Author_Institution :
Sch. of Electr. & Comput. Eng., Inha Univ., Inchon, South Korea
Abstract :
The pyroelectric response of detectors with a lead-lanthanum-titanate (PLT) sensing element on either a Si and a SiO 2 substrate are calculated as functions of the pyroelectric layer and the underlying layer thicknesses. It is found that the detector with an air gap has a frequency-independent responsivity over a wide frequency range. A correlation is found between the type of frequency response in each frequency region and the corresponding dominant mechanism for heat loss
Keywords :
ferroelectric materials; ferroelectric thin films; lanthanum compounds; lead compounds; pyroelectric detectors; PbLaTiO3; Si; Si substrate; SiO2; SiO2 substrate; air gap; detectors; frequency response; frequency-independent responsivity; heat loss; layer thickness; lead-lanthanum-titanate; pyroelectric layer; pyroelectric response; response; thin film pyroelectric sensors; Detectors; Dielectric materials; Frequency; Nonhomogeneous media; Pyroelectricity; Substrates; Temperature distribution; Thermal conductivity; Thin film sensors; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
Conference_Location :
Montreux
Print_ISBN :
0-7803-4959-8
DOI :
10.1109/ISAF.1998.786673
