DocumentCode
3078042
Title
MEMS-based devices
Author
Chengkuo Lee
Author_Institution
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
fYear
2012
fDate
2-6 July 2012
Firstpage
539
Lastpage
540
Abstract
Novel actuation mechanisms for optical MEMS devices have been developed for scanning mirrors and variable optical attenuation (VOA) applications. Recent progress in optical MEMS is highlighted as well.
Keywords
micro-optomechanical devices; mirrors; optical attenuators; VOA application; optical MEMS devices; scanning mirrors; variable optical attenuation application; Actuators; Attenuation; Micromechanical devices; Mirrors; Optical attenuators; Optical sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Opto-Electronics and Communications Conference (OECC), 2012 17th
Conference_Location
Busan
ISSN
2166-8884
Print_ISBN
978-1-4673-0976-9
Electronic_ISBN
2166-8884
Type
conf
DOI
10.1109/OECC.2012.6276561
Filename
6276561
Link To Document