Title :
MEMS-based devices
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
Novel actuation mechanisms for optical MEMS devices have been developed for scanning mirrors and variable optical attenuation (VOA) applications. Recent progress in optical MEMS is highlighted as well.
Keywords :
micro-optomechanical devices; mirrors; optical attenuators; VOA application; optical MEMS devices; scanning mirrors; variable optical attenuation application; Actuators; Attenuation; Micromechanical devices; Mirrors; Optical attenuators; Optical sensors;
Conference_Titel :
Opto-Electronics and Communications Conference (OECC), 2012 17th
Conference_Location :
Busan
Print_ISBN :
978-1-4673-0976-9
Electronic_ISBN :
2166-8884
DOI :
10.1109/OECC.2012.6276561
