Title :
New piezoelectric KNbO3 films for SAW device applications
Author :
Yamanouchi, K. ; Odagawa, H. ; Kojima, T. ; Cho, Y.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
KNbO3 films have been deposited on STO (SrTiO3 ) substrates using MOCVD techniques. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. The experimental results show the electromechanical coupling coefficients (K2) of 0.021 at the center frequency of 960 MHz and h/λ=0.24 (λ:SAW wavelength, h:film thickness of KNbO3). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals
Keywords :
MOCVD; MOCVD coatings; piezoelectric materials; piezoelectric thin films; potassium compounds; surface acoustic wave devices; surface acoustic waves; ultrasonic devices; ultrasonic propagation; 960 MHz; KNbO3; MOCVD; SAW device applications; SrTiO3; SrTiO3 substrates; as-grown films; center frequency; electromechanical coupling coefficients; piezoelectric KNbO3 films; piezoelectric constants; single crystals; Acoustic propagation; Crystals; Frequency; MOCVD; Optical films; Optical surface waves; Piezoelectric films; Polarization; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
Conference_Location :
Montreux
Print_ISBN :
0-7803-4959-8
DOI :
10.1109/ISAF.1998.786714
