Fine scale piezoelectric 1-3 composites: a new approach of cost effective fabrication

Author

Starke, S. ; Schonecker, A. ; Gebhardt, W.

Author_Institution

Fraunhofer Inst. fur Keramische Technol. und Sinterwerkstoffe, Dresden, Germany

fYear

1998

fDate

1998

Firstpage

393

Lastpage

396

Abstract

A new method of fabricating 1-3 composites for transducer applications at frequencies ⩾5 MHz has been developed. This method uses a master mold which has been structured by microsystems technologies such as micromachining, chemical or plasma etching. From this mold templates of a soft polymer have been taken. They were infiltrated with a ceramic slip. After drying the ceramic green body could be demolded without loss of the transfer mold. The process steps of this so called “soft mold” method are described. First results on 1-3 composites with square rods of 85 μm and 145 μm edge length are reported. The composites showed high coupling coefficients k_t, of 0.71 and 0.79, respectively

Keywords

composite materials; etching; materials preparation; micromachining; piezoceramics; polymers; sputter etching; ceramic green body; ceramic slip; chemical etching; cost effective fabrication; fine scale piezoelectric 1-3 composites; high coupling coefficients; master mold; micromachining; microsystems technologies; plasma etching; process steps; soft polymer; transducer applications; transfer mold; Ceramics; Chemical technology; Costs; Etching; Frequency; Micromachining; Piezoelectric transducers; Plasma applications; Plasma chemistry; Polymers;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on

Conference_Location

Montreux

ISSN

1099-4734

Print_ISBN

0-7803-4959-8

Type

conf

DOI

10.1109/ISAF.1998.786716

Filename

786716