Title :
Fine scale piezoelectric 1-3 composites: a new approach of cost effective fabrication
Author :
Starke, S. ; Schonecker, A. ; Gebhardt, W.
Author_Institution :
Fraunhofer Inst. fur Keramische Technol. und Sinterwerkstoffe, Dresden, Germany
Abstract :
A new method of fabricating 1-3 composites for transducer applications at frequencies ⩾5 MHz has been developed. This method uses a master mold which has been structured by microsystems technologies such as micromachining, chemical or plasma etching. From this mold templates of a soft polymer have been taken. They were infiltrated with a ceramic slip. After drying the ceramic green body could be demolded without loss of the transfer mold. The process steps of this so called “soft mold” method are described. First results on 1-3 composites with square rods of 85 μm and 145 μm edge length are reported. The composites showed high coupling coefficients kt, of 0.71 and 0.79, respectively
Keywords :
composite materials; etching; materials preparation; micromachining; piezoceramics; polymers; sputter etching; ceramic green body; ceramic slip; chemical etching; cost effective fabrication; fine scale piezoelectric 1-3 composites; high coupling coefficients; master mold; micromachining; microsystems technologies; plasma etching; process steps; soft polymer; transducer applications; transfer mold; Ceramics; Chemical technology; Costs; Etching; Frequency; Micromachining; Piezoelectric transducers; Plasma applications; Plasma chemistry; Polymers;
Conference_Titel :
Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
Conference_Location :
Montreux
Print_ISBN :
0-7803-4959-8
DOI :
10.1109/ISAF.1998.786716
