Title :
Scaling limitations of laser-fabricated nerve electrode arrays
Author :
Henle, Christian ; Schuettler, Martin ; Ordonez, Juan S. ; Stieglitz, Thomas
Author_Institution :
Laboratory for Biomedical Microtechnology, Department of Microsystems Engineering, University of Freiburg, Germany
Abstract :
A laser technology for manufacturing implantable electrode arrays, using spin-on polydimethylsiloxane (PDMS) and platinum foil as materials, was investigated in respect to its scaling limitations. The following aspects were analyzed: Minimal width and centre-to-centre distance of platinum tracks, the ability of spin-on PDMS to flow between platinum tracks with very narrow gaps and the electrical insulation properties of thin spin-coated PDMS.
Keywords :
Biomedical electrodes; Curing; Humidity; Optical arrays; Optical device fabrication; Optical materials; Platinum; Rubber; Silicon on insulator technology; Viscosity; Biocompatible Materials; Dimethylpolysiloxanes; Electric Stimulation; Electrodes; Electrodes, Implanted; Equipment Design; Lasers; Manufactured Materials; Materials Testing; Microelectrodes; Microscopy, Electron, Scanning; Platinum; Silicone Elastomers; Silicones; Surface Properties;
Conference_Titel :
Engineering in Medicine and Biology Society, 2008. EMBS 2008. 30th Annual International Conference of the IEEE
Conference_Location :
Vancouver, BC
Print_ISBN :
978-1-4244-1814-5
Electronic_ISBN :
1557-170X
DOI :
10.1109/IEMBS.2008.4650137