Title :
Scanning nonlinear dielectric microscope with submicron resolution
Author :
Cho, Yasuo ; Matsuura, Kaori ; Yamanouchi, Kazuhiko
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
This article describes a new purely electrical technique for imaging the state of remanent polarization of a ferroelectric material by measuring the microscopic point-to-point variation of its nonlinear dielectric constants. First, the theory for detecting polarization is described. Secondly, the technique for measuring the nonlinear dielectric response is described. Finally, using this new microscope, area scans are obtained of the polarization domains in a periodically polarized and a multidomain lithium tantalate substrate, and of lead zirconate titanate ceramic and thin film
Keywords :
dielectric measurement; dielectric polarisation; electric domains; ferroelectric ceramics; ferroelectric materials; ferroelectric thin films; lead compounds; lithium compounds; permittivity; permittivity measurement; scanning probe microscopy; LiTaO3; PZT; PbZrO3TiO3; area scans; electrical technique; ferroelectric material; lead zirconate titanate ceramic; microscopic point-to-point variation; multidomain lithium tantalate substrate; nonlinear dielectric constants; nonlinear dielectric response; polarization domains; remanent polarization; scanning nonlinear dielectric microscope; submicron resolution; thin film; Dielectric constant; Dielectric measurements; Dielectric substrates; Dielectric thin films; Electric variables measurement; Ferroelectric materials; Lithium compounds; Microscopy; Polarization; Titanium compounds;
Conference_Titel :
Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
Conference_Location :
Montreux
Print_ISBN :
0-7803-4959-8
DOI :
10.1109/ISAF.1998.786725
