Formation and microstructure of ferroelectric lead lanthanum zirconate titanate thick film

Author

Ichiki, M. ; Akedo, J. ; Schroth, A. ; Morikawa, Y. ; Maeda, R. ; Ishikawa, Y.

Author_Institution

Mech. Eng. Lab., AIST, Ibaraki, Japan

fYear

1998

fDate

1998

Firstpage

543

Lastpage

546

Abstract

This paper reports the thick film formation of lead lanthanum zirconate titanate using a gas-deposition method from its ultra-fine particle condition. This fabrication method has been developed recently as a useful technology for smart microelectromechanical systems. Thick films up to 10 μm were produced. Scanning electron microscopy observation of the film surfaces was carried out. Each particle has a clear grain boundary. This means a kind of firing or boundary fusion seemed to be occurring in the formation process. In this study we clarified that the size of the particle would be one of the important factors affecting the film characteristics

Keywords

ferroelectric materials; grain boundaries; lead compounds; particle size; scanning electron microscopy; 10 mum; PZT; PbZrO3TiO3; gas-deposition method; grain boundary; particle size; scanning electron microscopy; thick film; ultra-fine particle; Actuators; Fabrication; Ferroelectric materials; Lanthanum; Microstructure; Scanning electron microscopy; Sputtering; Surface morphology; Thick films; Titanium compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on

Conference_Location

Montreux

ISSN

1099-4734

Print_ISBN

0-7803-4959-8

Type

conf

DOI

10.1109/ISAF.1998.786751

Filename

786751